Accuracy and error analysis of real-time surface profile measurement with sinusoidal phase modulation interferometer

Mapping Intimacies ◽

10.1117/12.828674 ◽

2009 ◽

Author(s):

Guotian He ◽

Helun Jiang ◽

Rongchang Liao

Keyword(s):

Error Analysis ◽

Real Time ◽

Phase Modulation ◽

Surface Profile ◽

Profile Measurement ◽

Surface Profile Measurement

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Two-grating interferometer with sinusoidal phase modulation for surface profile measurement

Optical Engineering ◽

10.1117/1.1883083 ◽

2005 ◽

Vol 44 (4) ◽

pp. 043601 ◽

Author(s):

Yande Xu

Keyword(s):

Phase Modulation ◽

Surface Profile ◽

Profile Measurement ◽

Grating Interferometer ◽

Surface Profile Measurement

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Real-time surface profile measurement using a feedback type of sinusoidal phase modulating interferometer

Optik ◽

10.1016/j.ijleo.2007.12.014 ◽

2009 ◽

Vol 120 (11) ◽

pp. 553-557 ◽

Author(s):

He Guotian ◽

Liao Changrong ◽

Jiang helun ◽

Yuangang Lu ◽

Huang Shanglian

Keyword(s):

Real Time ◽

Surface Profile ◽

Profile Measurement ◽

Feedback Type ◽

Sinusoidal Phase Modulating ◽

Surface Profile Measurement

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Real-time two-dimensional surface profile measurement in a sinusoidal phase-modulating laser diode interferometer

Optical Engineering ◽

10.1117/12.173561 ◽

1994 ◽

Vol 33 (8) ◽

pp. 2754 ◽

Author(s):

Takamasa Suzuki

Keyword(s):

Real Time ◽

Laser Diode ◽

Surface Profile ◽

Profile Measurement ◽

Two Dimensional ◽

Sinusoidal Phase Modulating ◽

Dimensional Surface ◽

Surface Profile Measurement

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Sinusoidal phase modulating interferometer for real-time surface profile measurement

10.1117/12.828715 ◽

2009 ◽

Author(s):

Xing-Wen Tan ◽

Guo-Tian He

Keyword(s):

Real Time ◽

Surface Profile ◽

Profile Measurement ◽

Sinusoidal Phase Modulating ◽

Surface Profile Measurement

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Surface profile measurement of a diffraction grating by a laser beam scanning interferometer using sinusoidal phase modulation

10.1117/12.2025328 ◽

2013 ◽

Author(s):

Osami Sasaki ◽

Takuya Kubota ◽

Samuel Choi ◽

Takamasa Suzuki

Keyword(s):

Diffraction Grating ◽

Phase Modulation ◽

Surface Profile ◽

Profile Measurement ◽

Beam Scanning ◽

Scanning Interferometer ◽

Laser Beam Scanning ◽

Surface Profile Measurement

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A new real-time surface profile measurement using a sinusoidal phase modulating interferometry

10.1117/12.725393 ◽

2007 ◽

Author(s):

Guotian He ◽

Xiangzhao Wang ◽

Dailin Li ◽

Jianmin Hu

Keyword(s):

Real Time ◽

Surface Profile ◽

Profile Measurement ◽

Sinusoidal Phase Modulating ◽

Surface Profile Measurement

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Fiber-optic interferometer for surface profile measurement with vibration suppression

Optics Express ◽

10.1364/oe.19.004223 ◽

2011 ◽

Vol 19 (5) ◽

pp. 4223

Author(s):

Taekmin Kwon ◽

Seung-Woo Kim

Keyword(s):

Fiber Optic ◽

Vibration Suppression ◽

Surface Profile ◽

Profile Measurement ◽

Fiber Optic Interferometer ◽

Surface Profile Measurement

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Pre-correction of projected gratings for surface profile measurement

10.1117/12.839317 ◽

2008 ◽

Author(s):

Cuiru Sun ◽

Hua Lu

Keyword(s):

Surface Profile ◽

Profile Measurement ◽

Surface Profile Measurement

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Large surface profile measurement with instantaneous phase-shifting interferometry

Optical Engineering ◽

10.1117/1.1532331 ◽

2003 ◽

Vol 42 (2) ◽

pp. 367 ◽

Author(s):

N. R. Sivakumar

Keyword(s):

Surface Profile ◽

Phase Shifting ◽

Profile Measurement ◽

Instantaneous Phase ◽

Phase Shifting Interferometry ◽

Surface Profile Measurement

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Light source with orthogonally linear polarized two‐frequency beam from laser diode and surface profile measurement

Optical Engineering ◽

10.1117/1.600714 ◽

1996 ◽

Vol 35 (4) ◽

pp. 1070 ◽

Author(s):

Yukitoshi Otani

Keyword(s):

Light Source ◽

Laser Diode ◽

Surface Profile ◽

Profile Measurement ◽

Surface Profile Measurement

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