Real-time two-dimensional surface profile measurement in a sinusoidal phase-modulating laser diode interferometer

Optical Engineering ◽

10.1117/12.173561 ◽

1994 ◽

Vol 33 (8) ◽

pp. 2754 ◽

Author(s):

Takamasa Suzuki

Keyword(s):

Real Time ◽

Laser Diode ◽

Surface Profile ◽

Profile Measurement ◽

Two Dimensional ◽

Sinusoidal Phase Modulating ◽

Dimensional Surface ◽

Surface Profile Measurement

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Real-time surface profile measurement using a feedback type of sinusoidal phase modulating interferometer

Optik ◽

10.1016/j.ijleo.2007.12.014 ◽

2009 ◽

Vol 120 (11) ◽

pp. 553-557 ◽

Author(s):

He Guotian ◽

Liao Changrong ◽

Jiang helun ◽

Yuangang Lu ◽

Huang Shanglian

Keyword(s):

Real Time ◽

Surface Profile ◽

Profile Measurement ◽

Feedback Type ◽

Sinusoidal Phase Modulating ◽

Surface Profile Measurement

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Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement

Optical Engineering ◽

10.1117/1.2148447 ◽

2005 ◽

Vol 44 (12) ◽

pp. 125602 ◽

Author(s):

Xuefeng Zhao

Keyword(s):

Laser Diode ◽

Machine Surface ◽

Surface Profile ◽

Profile Measurement ◽

Sinusoidal Phase Modulating ◽

Surface Profile Measurement

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Sinusoidal phase modulating interferometer for real-time surface profile measurement

10.1117/12.828715 ◽

2009 ◽

Author(s):

Xing-Wen Tan ◽

Guo-Tian He

Keyword(s):

Real Time ◽

Surface Profile ◽

Profile Measurement ◽

Sinusoidal Phase Modulating ◽

Surface Profile Measurement

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A new real-time surface profile measurement using a sinusoidal phase modulating interferometry

10.1117/12.725393 ◽

2007 ◽

Author(s):

Guotian He ◽

Xiangzhao Wang ◽

Dailin Li ◽

Jianmin Hu

Keyword(s):

Real Time ◽

Surface Profile ◽

Profile Measurement ◽

Sinusoidal Phase Modulating ◽

Surface Profile Measurement

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Light source with orthogonally linear polarized two‐frequency beam from laser diode and surface profile measurement

Optical Engineering ◽

10.1117/1.600714 ◽

1996 ◽

Vol 35 (4) ◽

pp. 1070 ◽

Author(s):

Yukitoshi Otani

Keyword(s):

Light Source ◽

Laser Diode ◽

Surface Profile ◽

Profile Measurement ◽

Surface Profile Measurement

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Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam

Applied Optics ◽

10.1364/ao.43.004157 ◽

2004 ◽

Vol 43 (21) ◽

pp. 4157 ◽

Author(s):

Ryo Shinozaki ◽

Osami Sasaki ◽

Takamasa Suzuki

Keyword(s):

Surface Profile ◽

Profile Measurement ◽

Scanning Method ◽

One Dimensional ◽

Angular Deflection ◽

Dimensional Surface ◽

Surface Profile Measurement

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Three-dimensional surface profile measurement of a cylindrical surface using a multi-beam angle sensor

Precision Engineering ◽

10.1016/j.precisioneng.2019.11.009 ◽

2020 ◽

Vol 62 ◽

pp. 62-70 ◽

Author(s):

Meiyun Chen ◽

Shengli Xie ◽

Heng Wu ◽

Satoru Takahashi ◽

Kiyoshi Takamasu

Keyword(s):

Cylindrical Surface ◽

Three Dimensional ◽

Surface Profile ◽

Profile Measurement ◽

Angle Sensor ◽

Dimensional Surface ◽

Surface Profile Measurement

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Stabilization improvements of laser-diode closed-loop heterodyne phase-shifting interferometer for surface profile measurement

Applied Optics ◽

10.1364/ao.42.001805 ◽

2003 ◽

Vol 42 (10) ◽

pp. 1805 ◽

Author(s):

Masayuki Yokota ◽

Atsuyoshi Asaka ◽

Toshihiko Yoshino

Keyword(s):

Laser Diode ◽

Closed Loop ◽

Surface Profile ◽

Phase Shifting ◽

Profile Measurement ◽

Surface Profile Measurement

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Accuracy and error analysis of real-time surface profile measurement with sinusoidal phase modulation interferometer

10.1117/12.828674 ◽

2009 ◽

Author(s):

Guotian He ◽

Helun Jiang ◽

Rongchang Liao

Keyword(s):

Error Analysis ◽

Real Time ◽

Phase Modulation ◽

Surface Profile ◽

Profile Measurement ◽

Surface Profile Measurement

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Three-dimensional surface profile measurement by using liquid crystal grating with triangular intensity distribution patterns

10.1117/12.467400 ◽

2002 ◽

Author(s):

Hiroo Fujita ◽

Akira Suguro ◽

Toru Yoshizawa

Keyword(s):

Liquid Crystal ◽

Intensity Distribution ◽

Three Dimensional ◽

Surface Profile ◽

Distribution Patterns ◽

Profile Measurement ◽

Liquid Crystal Grating ◽

Dimensional Surface ◽

Surface Profile Measurement

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