Density functional theory calculations for estimation of gettering sites of C, H, intrinsic point defects and related complexes in Si wafers
2016 ◽
Vol 44
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pp. 13-17
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2009 ◽
Vol 11
(17)
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pp. 3226
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2016 ◽
Vol 2016.29
(0)
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pp. 060
2017 ◽
Vol 97
(25)
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pp. 2164-2181
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Keyword(s):
2014 ◽
Vol 16
(26)
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pp. 13477-13482
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Keyword(s):
2016 ◽
Vol 5
(4)
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pp. P3176-P3195
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Keyword(s):