Nanoscale Cu/Ta multilayer deposition by co-sputtering on a rotating substrate. Empirical model and experiment
2016 ◽
Vol 302
◽
pp. 284-292
◽
2017 ◽
Vol 11
(2)
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pp. 43-64
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Keyword(s):
Keyword(s):
2018 ◽
Vol 2
(1)
◽
pp. 204-232