Nanoscale Cu/Ta multilayer deposition by co-sputtering on a rotating substrate. Empirical model and experiment

2016 ◽  
Vol 302 ◽  
pp. 284-292 ◽  
Author(s):  
Claudia M. Müller ◽  
Alla S. Sologubenko ◽  
Stephan S.A. Gerstl ◽  
Martin J. Süess ◽  
Diana Courty ◽  
...  
2020 ◽  
Vol 237 ◽  
pp. 116331 ◽  
Author(s):  
Mahbub Morshed ◽  
Alexandre Zimmer ◽  
Laurent Broch ◽  
Halima Alem ◽  
Denis Roizard

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