Transmission electron microscope analysis of epitaxial growth processes in the sputtered β-FeSi2/Si(001) films

2004 ◽  
Vol 461 (1) ◽  
pp. 120-125 ◽  
Author(s):  
Masaru Itakura ◽  
Daigo Norizumi ◽  
Tomohisa Ohta ◽  
Yoshitsugu Tomokiyo ◽  
Noriyuki Kuwano
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