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Distributed microscopic actuation analysis of deformable plate membrane mirrors
Mechanical Systems and Signal Processing
◽
10.1016/j.ymssp.2017.07.031
◽
2018
◽
Vol 100
◽
pp. 57-84
◽
Cited By ~ 5
Author(s):
Yifan Lu
◽
Honghao Yue
◽
Zongquan Deng
◽
Hornsen Tzou
Keyword(s):
Membrane Mirrors
Download Full-text
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◽
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◽
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(11)
◽
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Author(s):
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◽
唐敏学 Tang Minxue
◽
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◽
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◽
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Surface micro-machined SU-8 2002 membrane mirrors for focus control
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2007
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◽
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◽
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◽
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◽
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