Design Equations & System Implications of Thin Film Membrane Mirrors and Windows

2007 ◽  
Author(s):  
Jason Lindler ◽  
Eric Flint ◽  
Charles Rankin
Keyword(s):  
Thin Film ◽  
Membrane Mirrors ◽  
Thin Film Membrane

Single crystal PZT thin film membrane with highly conductive electrodes

2012 ◽  
Author(s):  
S. Yin ◽  
J. Abergel ◽  
A. Bontempi ◽  
T. Ricart ◽  
G. Le Rhun ◽  
...  
Keyword(s):  
Thin Film ◽  
Single Crystal ◽  
Pzt Thin Film ◽  
Thin Film Membrane

An Ultrafast Thin-Film Microcalorimeter with Monola Yer Sensitivity (J/m2)

1995 ◽  
Vol 398 ◽  
Author(s):  
S.L. Lai ◽  
P. Infante ◽  
G. Ramanath ◽  
L.H. Allen
Keyword(s):  
Thin Film ◽  
Heating Rate ◽  
Current Pulse ◽  
High Sensitivity ◽  
Melting Process ◽  
Thermal Mass ◽  
Calorimetric Measurements ◽  
Calorimetric Technique ◽  
Dc Current ◽  
Thin Film Membrane

ABSTRACTWe introduce a high-sensitivity (∼1 J/m2) scanning microcalorimeter that can be used to perform direct calorimetric measurements on thin film samples at ultrafast heating rate (∼104 °C/s). This novel microcalorimeter is fabricated by utilizing SiN thin-film membrane technology, resulting in dramatically reduced thermal mass of the system. Calorimetric measurements are accomplished by applying a dc-current pulse to the thin-film metal (Ni) heater which also serves as a thermometer, and monitoring the real-time voltage and current of the heater. The temperature of the system and the energy delivered to the system are then determined. This calorimetric technique has been demonstrated by measuring the melting process of thin Sn films with thickness ranging from 13 to 1000 Å, and shows potential for calorimetric probing of irreversible reactions at interfaces and surfaces, as well as transformations in nanostructured materials.

Fatigue characteristics of polycrystalline silicon thin-film membrane and its dependence on humidity

2013 ◽  
Vol 23 (3) ◽  
pp. 035032 ◽  
Author(s):  
Tomoki Tanemura ◽  
Shuichi Yamashita ◽  
Hiroyuki Wado ◽  
Yukihiro Takeuchi ◽  
Toshiyuki Tsuchiya ◽  
...  
Keyword(s):  
Thin Film ◽  
Polycrystalline Silicon ◽  
Silicon Thin Film ◽  
Fatigue Characteristics ◽  
Thin Film Membrane

Investigation of the Natural Convection Boundary Condition in Microfabricated Structures

2005 ◽  
Author(s):  
Xuejiao Hu ◽  
Ankur Jain ◽  
Kenneth E. Goodson
Keyword(s):  
Thin Film ◽  
Boundary Condition ◽  
Heat Conduction ◽  
Natural Convection ◽  
Shape Factor ◽  
Analytical Modeling ◽  
Convection Boundary Condition ◽  
Convection Boundary ◽  
3 Omega ◽  
Thin Film Membrane

Heat loss through surrounding air has important thermal effect on microfabricated structures. This effect is generally modeled as a natural convection boundary condition. However, how to determine the convective coefficient (h) at microscales is a debate. In this paper, a micro heater is fabricated on a suspended thin film membrane. The natural convection is investigated using the 3-omega measurements and complex analytical modeling. It is found that h seems larger than that at larger scales; however, it is also proved that the increased h is actually contributed by heat conduction instead of heat convection. A method of determining the phenomenal h that can be used for microfabricated structures is proposed by using the heat conduction shape factor.

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