Application of Repetitive SA Method to Scheduling Problems of Chemical Processes

1997 ◽  
Vol 21 (1-2) ◽  
pp. S1087-S1092 ◽  
Author(s):  
Y Murakami
1997 ◽  
Vol 21 ◽  
pp. S1087-S1092 ◽  
Author(s):  
Y. Murakami ◽  
H. Uchiyama ◽  
S. Hasebe ◽  
I. Hashimoto

Author(s):  
Yoshihiro MURAKAMI ◽  
Hironobu UCHIYAMA ◽  
Shinji HASEBE ◽  
Iori HASHIMOTO

1982 ◽  
Vol 14 (3) ◽  
pp. 147-155 ◽  
Author(s):  
R. W. Lieberman ◽  
I. B. Turksen

2012 ◽  
Vol 132 (1) ◽  
pp. 151-159
Author(s):  
Akiyoshi Ohno ◽  
Tatsushi Nishi ◽  
Masahiro Inuiguchi ◽  
Satoru Takahashi ◽  
Kenji Ueda

1991 ◽  
Vol 223 ◽  
Author(s):  
Hans P. Zappe ◽  
Gudrun Kaufel

ABSTRACTThe effect of numerous plasma reative ion etch and physical milling processes on the electrical behavior of GaAs bulk substrates has been investigated by means of electric microwave absorption. It was seen that plasma treatments at quite low energies may significantly affect the electrical quality of the etched semiconductor. Predominantly physical plasma etchants (Ar) were seen to create significant damage at very low energies. Chemical processes (involving Cl or F), while somewhat less pernicious, also gave rise to electrical substrate damage, the effect greater for hydrogenic ambients. Whereas rapid thermal anneal treatments tend to worsen the electrical integrity, some substrates respond positively to long-time high temperature anneal steps.


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