The kinetic growth model applied to micropipes in 6H-SiC

1997 ◽  
Vol 6 (10) ◽  
pp. 1269-1271 ◽  
Author(s):  
J. Heindl ◽  
W. Dorsch ◽  
R. Eckstein ◽  
D. Hofmann ◽  
T. Marek ◽  
...  
Keyword(s):  
1996 ◽  
Vol 422 ◽  
Author(s):  
A. Polman ◽  
R. Serna ◽  
J. S. Custer ◽  
M. Lohmeier

AbstractThe incorporation of erbium in silicon is studied during solid phase epitaxy (SPE) of Erimplanted amorphous Si on crystalline Si, and during Si molecular beam epitaxy (MBE). Segregation and trapping of Er is observed on Si(100), both during SPE and MBE. The trapping during SPE shows a discontinuous dependence on Er concentration, attributed to the effect of defect trap sites in the amorphous Si near the interface. Trapping during MBE is described by a continuous kinetic growth model. Above a critical Er density (which is lower for MBE than for SPE), growth instabilities occur, attributed to the formation of silicide precipitates. No segregation occurs during MBE on Si(111), attributed to the epitaxial growth of silicide precipitates.


1996 ◽  
Vol 29 (20) ◽  
pp. L527-L531 ◽  
Author(s):  
Roberto N Onody ◽  
Ubiraci P C Neves

1987 ◽  
Vol 47 (1-2) ◽  
pp. 1-16 ◽  
Author(s):  
Armin Bunde ◽  
Sasuke Miyazima ◽  
H. Eugene Stanley

2019 ◽  
Vol 16 (2) ◽  
pp. 553-571
Author(s):  
Sambasiva Rao Katuri ◽  
◽  
Rajesh Khanna ◽  

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