Annealing Effects on the Phase and Electronic Structure Evolutions of SiO Film by Electron Energy Loss Spectroscopy
Keyword(s):
Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006
1998 ◽
Vol 47
(4)
◽
pp. 301-309
◽