In-depth profile analysis of oxide films by radiofrequency glow discharge optical emission spectrometry (rf-GD-OES): possibilities of depth-resolved solid-state speciation

2008 ◽  
Vol 23 (10) ◽  
pp. 1378 ◽  
Author(s):  
Julien Malherbe ◽  
Beatriz Fernández ◽  
Hervé Martinez ◽  
Patrick Chapon ◽  
Peter Panjan ◽  
...  
Keyword(s):  
Solid State ◽  
Glow Discharge ◽  
Depth Profile ◽  
Profile Analysis ◽  
Oxide Films ◽  
Optical Emission ◽  
Optical Emission Spectrometry ◽  
Emission Spectrometry ◽  
Depth Profile Analysis ◽  
Radiofrequency Glow Discharge
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