scholarly journals High-order aberration compensation with multi-frame blind deconvolution and phase diversity image restoration techniques

2010 ◽  
Vol 521 ◽  
pp. A68 ◽  
Author(s):  
G. B. Scharmer ◽  
M. G. Löfdahl ◽  
T. I. M. van Werkhoven ◽  
J. de la Cruz Rodriguez
Keyword(s):  
Image Restoration ◽  
Blind Deconvolution ◽  
High Order ◽  
Phase Diversity ◽  
High Order Aberration ◽  
Restoration Techniques

A DSP-based blind deconvolution algorithm for motion image restoration

2018 ◽  
Vol 22 (S4) ◽  
pp. 8493-8500
Author(s):  
Jian Zhao ◽  
Yuan Shi ◽  
Shunli Zhang ◽  
Duan Xie
Keyword(s):  
Image Restoration ◽  
Blind Deconvolution ◽  
Deconvolution Algorithm

High-Order Aberration Measurement Method for Hyper-NA Lithographic Projection Lens

2017 ◽  
Vol 37 (4) ◽  
pp. 0412003
Author(s):  
诸波尔 Zhu Boer ◽  
王向朝 Wang Xiangzhao ◽  
李思坤 Li Sikun ◽  
孟泽江 Meng Zejiang ◽  
张恒 Zhang Heng ◽  
...  
Keyword(s):  
Measurement Method ◽  
High Order ◽  
Projection Lens ◽  
High Order Aberration

A wavefront aberrometer for dynamic high-order aberration measurement

Optik ◽  
2010 ◽  
Vol 121 (15) ◽  
pp. 1405-1411
Author(s):  
Xiang Yu ◽  
Yun Dai ◽  
Xuejun Rao ◽  
Cheng Wang ◽  
Lixia Xue ◽  
...  
Keyword(s):  
High Order ◽  
High Order Aberration

Parallel processing of solar image restoration with phase diversity technique

2018 ◽  
Author(s):  
Takahiro Suzuki ◽  
Noriaki Miura ◽  
Susumu Kuwamura ◽  
Shin Oya ◽  
Satoru Ueno ◽  
...  
Keyword(s):  
Parallel Processing ◽  
Image Restoration ◽  
Solar Image ◽  
Phase Diversity ◽  
Diversity Technique

A method of image restoration technology based on parallel phase diversity algorithm

2019 ◽  
Author(s):  
Minshi Liu ◽  
Yupeng Jiang ◽  
Zhongwei Liu ◽  
Lianxiang Jiang ◽  
Bin Wang
Keyword(s):  
Image Restoration ◽  
Phase Diversity

High-order aberration control during exposure for leading-edge lithography projection optics

2016 ◽  
Author(s):  
Yasuhiro Ohmura ◽  
Yosuke Tsuge ◽  
Toru Hirayama ◽  
Hironori Ikezawa ◽  
Daisuke Inoue ◽  
...  
Keyword(s):  
Leading Edge ◽  
High Order ◽  
High Order Aberration ◽  
Projection Optics
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