Development of key components and technologies for a high repetition rate and high-power excimer laser

1998 ◽  
Vol 69 (1) ◽  
pp. 1-9 ◽  
Author(s):  
Tatsumi Goto ◽  
Shigeyuki Takagi ◽  
Kouji Kakizaki ◽  
Saburoh Saton ◽  
Shinichiro Kosugi ◽  
...  
Keyword(s):  
Excimer Laser ◽  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition

5 kHz high repetition rate and high power XeCl excimer laser

1995 ◽  
Vol 66 (11) ◽  
pp. 5162-5164 ◽  
Author(s):  
Tatsumi Goto ◽  
Koji Kakizaki ◽  
Shigeyuki Takagi ◽  
Noboru Okamoto ◽  
Saburo Sato ◽  
...  
Keyword(s):  
Excimer Laser ◽  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Xecl Excimer Laser
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