Signal transformation approach to fast nanopositioning
2009 ◽
Vol 80
(7)
◽
pp. 076101
◽
2012 ◽
Vol 57
(9)
◽
pp. 2294-2307
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2014 ◽
Vol 22
(2)
◽
pp. 729-736
◽
2010 ◽
Vol 27
(3)
◽
pp. 207-216
◽
Keyword(s):
Keyword(s):
2016 ◽
Vol 28
(9)
◽
pp. 04016076
◽