The formation of hydrogen passivated silicon single‐crystal surfaces using ultraviolet cleaning and HF etching

1988 ◽  
Vol 64 (7) ◽  
pp. 3516-3521 ◽  
Author(s):  
T. Takahagi ◽  
I. Nagai ◽  
A. Ishitani ◽  
H. Kuroda ◽  
Y. Nagasawa
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