Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
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Published By American Vacuum Society

1520-8559, 0734-2101
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Influence of the carrier wafer during GaN etching in Cl2 plasma

2022 ◽  
Vol 40 (2) ◽  
pp. 023202
Author(s):  
Thibaut Meyer ◽  
Camille Petit-Etienne ◽  
Erwine Pargon
Keyword(s):  
Carrier Wafer ◽  
Gan Etching

Spontaneous etching of B2O3 by HF gas studied using infrared spectroscopy, mass spectrometry, and density functional theory

2022 ◽  
Vol 40 (2) ◽  
pp. 022601
Author(s):  
Austin M. Cano ◽  
Suresh Kondati Natarajan ◽  
Jonathan L. Partridge ◽  
Simon D. Elliott ◽  
Steven M. George
Keyword(s):  
Mass Spectrometry ◽  
Density Functional Theory ◽  
Infrared Spectroscopy ◽  
Density Functional ◽  
Functional Theory

Surface-to-bulk core level shift in CoFe2O4 thin films

2022 ◽  
Vol 40 (2) ◽  
pp. 023201
Author(s):  
Arjun Subedi ◽  
Detian Yang ◽  
Yu Yun ◽  
Xiaoshan Xu ◽  
Peter A. Dowben
Keyword(s):  
Thin Films ◽  
Core Level ◽  
Level Shift ◽  
Core Level Shift

scholarly journals Emergent phenomena at oxide interfaces studied with standing-wave photoelectron spectroscopy

2022 ◽  
Vol 40 (2) ◽  
pp. 020801
Author(s):  
Cheng-Tai Kuo ◽  
Giuseppina Conti ◽  
Julien E. Rault ◽  
Claus M. Schneider ◽  
Slavomír Nemšák ◽  
...  
Keyword(s):  
Standing Wave ◽  
Photoelectron Spectroscopy ◽  
Oxide Interfaces ◽  
Emergent Phenomena

Resonant x-ray scattering method for measuring cation stoichiometry in BaSnO3 thin films

2022 ◽  
Vol 40 (1) ◽  
pp. 013411
Author(s):  
Claudia Lau ◽  
Nicholas G. Combs ◽  
Evguenia Karapetrova ◽  
Juan Jiang ◽  
Susanne Stemmer ◽  
...  
Keyword(s):  
Thin Films ◽  
Scattering Method ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering
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