Inspection of Integrated Circuit Photomasks using Optical Data Processing Techniques

1986 ◽  
Vol 34 (1) ◽  
pp. 1-10
Author(s):  
J. Watson ◽  
G. Mackay
1979 ◽  
Vol 18 (19) ◽  
pp. 3307 ◽  
Author(s):  
David Casasent ◽  
Thanh K. Luu

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