Fabrication of Through Micro-hole Arrays in Silicon Using Femtosecond Laser Irradiation and Selective Chemical Etching

2015 ◽  
Vol 32 (10) ◽  
pp. 107901 ◽  
Author(s):  
Bo Gao ◽  
Tao Chen ◽  
Ying Chen ◽  
Jin-Hai Si ◽  
Xun Hou
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Chemical Etching ◽  
Femtosecond Laser Irradiation ◽  
Micro Hole ◽  
Selective Chemical ◽  
Hole Arrays ◽  
Selective Chemical Etching

Wettability Control of Sapphire by Surface Texturing in Combination with Femtosecond Laser Irradiation and Chemical Etching

2020 ◽  
Vol 5 (31) ◽  
pp. 9555-9562
Author(s):  
Tongwei Liu ◽  
Haiying Wei ◽  
Jianxiang Li ◽  
Jiangang Lu ◽  
Qida Lin ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Chemical Etching ◽  
Surface Texturing ◽  
Femtosecond Laser Irradiation

scholarly journals Micromanufacturing in Fused Silica via Femtosecond Laser Irradiation Followed by Gas-Phase Chemical Etching

Micromachines ◽  
2012 ◽  
Vol 3 (4) ◽  
pp. 604-614 ◽  
Author(s):  
Francesco Venturini ◽  
Maurizio Sansotera ◽  
Rebeca Martinez Vazquez ◽  
Roberto Osellame ◽  
Giulio Cerullo ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Gas Phase ◽  
Chemical Etching ◽  
Fused Silica ◽  
Femtosecond Laser Irradiation ◽  
Phase Chemical

Uniform nano-ripples on the sidewall of silicon carbide micro-hole fabricated by femtosecond laser irradiation and acid etching

2014 ◽  
Vol 104 (24) ◽  
pp. 241907 ◽  
Author(s):  
Vanthanh Khuat ◽  
Tao Chen ◽  
Bo Gao ◽  
Jinhai Si ◽  
Yuncan Ma ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Femtosecond Laser Irradiation ◽  
Acid Etching ◽  
Micro Hole

scholarly journals Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching

2009 ◽  
Vol 17 (10) ◽  
pp. 8685 ◽  
Author(s):  
Krishna Chaitanya Vishnubhatla ◽  
Nicola Bellini ◽  
Roberta Ramponi ◽  
Giulio Cerullo ◽  
Roberto Osellame
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Chemical Etching ◽  
Shape Control ◽  
Fused Silica ◽  
Femtosecond Laser Irradiation
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