Microfluidic channels fabricated by femtosecond laser irradiation and chemical etching for optofluidic devices.

2009 ◽  
Author(s):  
K. C. Vishnubhatla ◽  
J. Clark ◽  
G. Lanzani ◽  
R. Ramponi ◽  
R. Osellame ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Chemical Etching ◽  
Femtosecond Laser Irradiation ◽  
Microfluidic Channels

scholarly journals Single-step fabrication of microfluidic channels filled with nanofibrous membrane using femtosecond laser irradiation

2021 ◽  
Author(s):  
Amirhossein Tavangar ◽  
Bo Tan ◽  
Krishnan Venkatakrishnan
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Microfluidic Channel ◽  
Scanning Speed ◽  
Single Step ◽  
Femtosecond Laser Irradiation ◽  
Microfluidic Channels ◽  
Ambient Conditions ◽  
Nanofibrous Structure ◽  
Channel Surface

In this paper, we demonstrate a new method of fabricating silicon microfluidic channels filled with a porous nanofibrous structure utilizing a femtosecond laser. The nanofibrous structure can act as a membrane used for microfiltration. This method allows us to generate both the microfluidic channel and the fibrous nanostructure in a single step under ambient conditions. Due to laser irradiation, a large number of nanoparticles ablate from the channel surface, and then aggregate and grow into porous nanofibrous structures and fill the channels. Energy dispersive x-ray spectroscopy (EDS) analysis was conducted to examine the oxygen concentration in the membrane structure. Our results demonstrated that by controlling the laser parameters including pulse repetition, pulse width and scanning speed, different microfluidic channels with a variety of porosity could be obtained.

Wettability Control of Sapphire by Surface Texturing in Combination with Femtosecond Laser Irradiation and Chemical Etching

2020 ◽  
Vol 5 (31) ◽  
pp. 9555-9562
Author(s):  
Tongwei Liu ◽  
Haiying Wei ◽  
Jianxiang Li ◽  
Jiangang Lu ◽  
Qida Lin ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Chemical Etching ◽  
Surface Texturing ◽  
Femtosecond Laser Irradiation

Integration of optical waveguides and microfluidic channels both fabricated by femtosecond laser irradiation

2007 ◽  
Vol 90 (23) ◽  
pp. 231118 ◽  
Author(s):  
Roberto Osellame ◽  
Valeria Maselli ◽  
Rebeca Martinez Vazquez ◽  
Roberta Ramponi ◽  
Giulio Cerullo
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Optical Waveguides ◽  
Femtosecond Laser Irradiation ◽  
Microfluidic Channels

scholarly journals Micromanufacturing in Fused Silica via Femtosecond Laser Irradiation Followed by Gas-Phase Chemical Etching

Micromachines ◽  
2012 ◽  
Vol 3 (4) ◽  
pp. 604-614 ◽  
Author(s):  
Francesco Venturini ◽  
Maurizio Sansotera ◽  
Rebeca Martinez Vazquez ◽  
Roberto Osellame ◽  
Giulio Cerullo ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Gas Phase ◽  
Chemical Etching ◽  
Fused Silica ◽  
Femtosecond Laser Irradiation ◽  
Phase Chemical

scholarly journals Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching

2009 ◽  
Vol 17 (10) ◽  
pp. 8685 ◽  
Author(s):  
Krishna Chaitanya Vishnubhatla ◽  
Nicola Bellini ◽  
Roberta Ramponi ◽  
Giulio Cerullo ◽  
Roberto Osellame
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Chemical Etching ◽  
Shape Control ◽  
Fused Silica ◽  
Femtosecond Laser Irradiation
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