A single-chip diaphragm-type miniature Fabry–Perot pressure sensor with improved cross-sensitivity to temperature
2004 ◽
Vol 15
(5)
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pp. 905-910
◽
2000 ◽
2010 ◽
Keyword(s):
2017 ◽
Vol 17
(14)
◽
pp. 4388-4393
◽
Keyword(s):