Nonlinear dynamic modeling of a V-shaped metal based thermally driven MEMS actuator for RF switches

2018 ◽  
Vol 28 (5) ◽  
pp. 054004 ◽  
Author(s):  
Maher Bakri-Kassem ◽  
Rached Dhaouadi ◽  
Mohamed Arabi ◽  
Shahabeddin V Estahbanati ◽  
Eihab Abdel-Rahman
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