A shallow buried-layer formation technique utilizing diffusion from implanted polysilicon layer

1989 ◽  
Vol 10 (7) ◽  
pp. 319-321
Author(s):  
K.K. O ◽  
H.-S. Lee ◽  
R. Reif ◽  
W. Frank ◽  
W. Metz ◽  
...  
Keyword(s):  
Layer Formation ◽  
Polysilicon Layer ◽  
Buried Layer ◽  
Formation Technique

Ion Implantation of High Doses of Co in Si1−xGex Alloys

1991 ◽  
Vol 235 ◽  
Author(s):  
A. Lauwers ◽  
K. Maex ◽  
W. Vandervorst ◽  
G. Brijs ◽  
J. Poortmans ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Sheet Resistance ◽  
Phase Formation ◽  
Crystalline Structure ◽  
Layer Formation ◽  
Silicide Layer ◽  
Buried Layer ◽  
High Doses

ABSTRACTThe implantation of high doses of Co in Si1−xGex alloys is investigated for several Ge concentrations. The aim of this work is to monitor phase formation, layer formation and crystalline structure of the layers. The samples are evaluated by RBS, SIMS, TEM and sheet resistance measurements. Similar as for the implantation of high doses of Co in Si, buried layer formation of CoSi2 in the Si1−x Gex alloy is observed with a concommitant expulsion of Ge out of the silicide layer.

Improved SOI LDMOS performance by using a partial stepped polysilicon layer as the buried layer

2019 ◽  
Vol 90 ◽  
pp. 7-12 ◽  
Author(s):  
Jingwei Guo ◽  
Shengdong Hu ◽  
Ye Huang ◽  
Qi Yuan ◽  
Dong Yang ◽  
...  
Keyword(s):  
Polysilicon Layer ◽  
Buried Layer

High-Dose and MeV-Energy Ion Implantation into Si for Buried-Layer Formation

1988 ◽  
Author(s):  
Tadashi SUZUKI ◽  
Masao TAMURA ◽  
Kiyonori OHYU ◽  
Nobuyoshi NATSUAKI
Keyword(s):  
Ion Implantation ◽  
High Dose ◽  
Layer Formation ◽  
Buried Layer

Low Temperature Ion Implantation for Buried Layer Formation

1990 ◽  
Author(s):  
T. SUZUKI ◽  
H. YAMAGUCHI ◽  
S. OHZONO ◽  
N. NATSUAKI
Keyword(s):  
Low Temperature ◽  
Ion Implantation ◽  
Layer Formation ◽  
Buried Layer

Silicide/Polysilicon Layer Formation Using Dynamic Recoil Mixing

1989 ◽  
Vol 136 (3) ◽  
pp. 873-875
Author(s):  
M. N. Kozicki ◽  
J. M. Robertson ◽  
H. Kheyrandish ◽  
A. E. Hill
Keyword(s):  
Layer Formation ◽  
Polysilicon Layer

Buried layer formation in silicon by laser radiation

1996 ◽  
Vol 79 (12) ◽  
pp. 9118-9122 ◽  
Author(s):  
A. Medvid’ ◽  
I. Madzhulis ◽  
J. Kaupužs ◽  
J. Blūms
Keyword(s):  
Laser Radiation ◽  
Layer Formation ◽  
Buried Layer

Models of buried layer formation

Vacuum ◽  
1991 ◽  
Vol 42 (5-6) ◽  
pp. 391 ◽  
Author(s):  
JA Kilner
Keyword(s):  
Layer Formation ◽  
Buried Layer
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