Erosion profile optimization in sputtering systems: a singular value decomposition (SVD) approach

Author(s):  
J. Kamali
2017 ◽  
Author(s):  
Ammar Ismael Kadhim ◽  
Yu-N Cheah ◽  
Inaam Abbas Hieder ◽  
Rawaa Ahmed Ali

2020 ◽  
Vol 13 (6) ◽  
pp. 1-10
Author(s):  
ZHOU Wen-zhou ◽  
◽  
FAN Chen ◽  
HU Xiao-ping ◽  
HE Xiao-feng ◽  
...  

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