Si/sub 3/N/sub 4/ film etching to form fine tapered structures for photonics applications

Author(s):  
B.R. Murthy ◽  
M.T. Doan ◽  
D.R. Lim
Keyword(s):  
2012 ◽  
Vol 45 (5) ◽  
pp. 401-410
Author(s):  
Amire Seyedfaraji ◽  
Vahid Ahmadi ◽  
Mahyar Noshiravani

1989 ◽  
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pp. 729-730 ◽  
Author(s):  
H.A. Haus ◽  
W.-P. Huang

1998 ◽  
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C. Alegria ◽  
R. Feced ◽  
M.N. Zervas ◽  
R.I. Laming

2017 ◽  
Vol 26 (6) ◽  
pp. 1400-1407 ◽  
Author(s):  
Vladimir Bliznetsov ◽  
Bin Li ◽  
Jae Wung Lee ◽  
Huamao Lin
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1961 ◽  
Vol 33 (6) ◽  
pp. 813-813 ◽  
Author(s):  
Frederick J. Young ◽  
Beverly H. Young
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1966 ◽  
Vol 39 (5A) ◽  
pp. 841-846 ◽  
Author(s):  
Frederick J. Young
Keyword(s):  

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