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Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)
◽
10.1109/memsys.2000.838475
◽
2000
◽
Keyword(s):
Mechanical Systems
◽
Micro Electro Mechanical Systems
◽
International Conference
◽
Annual International Conference
Download Full-text
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The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE
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10.1109/memsys.2003.1189670
◽
2003
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Keyword(s):
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Micro Electro Mechanical Systems
◽
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The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE
10.1109/memsys.2003
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2003
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Keyword(s):
Mechanical Systems
◽
Micro Electro Mechanical Systems
◽
International Conference
◽
Annual International Conference
Download Full-text
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)
10.1109/memsys.2000
◽
2000
◽
Keyword(s):
Mechanical Systems
◽
Micro Electro Mechanical Systems
◽
International Conference
◽
Annual International Conference
Download Full-text
The Seventeenth IEEE International Conference on Micro Electro Mechanical Systems - MEMS 2004 (Title Page)
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest
◽
10.1109/mems.2004.1290505
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Keyword(s):
Mechanical Systems
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Title Page
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Micro Electro Mechanical Systems
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2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
10.1109/mems35088.2015
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2015
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Keyword(s):
Mechanical Systems
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Micro Electro Mechanical Systems
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International Conference
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Ieee International Conference
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2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
10.1109/mems19783.2013
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2013
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Keyword(s):
Mechanical Systems
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Micro Electro Mechanical Systems
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2008 IEEE 21st International Conference on Micro Electro Mechanical Systems
10.1109/mems13071.2008
◽
2008
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Keyword(s):
Mechanical Systems
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Micro Electro Mechanical Systems
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International Conference
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2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)
10.1109/mems12365.2007
◽
2007
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Keyword(s):
Mechanical Systems
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Micro Electro Mechanical Systems
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2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
10.1109/mems38311.2016
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Keyword(s):
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Micro Electro Mechanical Systems
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The 34th IEEE International Conference on Micro Electro Mechanical Systems
Journal of Microelectromechanical Systems
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10.1109/jmems.2020.3008767
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2020
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Vol 29
(4)
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pp. 612-612
Keyword(s):
Mechanical Systems
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Micro Electro Mechanical Systems
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International Conference
◽
Ieee International Conference
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