2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

Mapping Intimacies ◽

10.1109/mems19783.2013 ◽

2013 ◽

Keyword(s):

Mechanical Systems ◽

Micro Electro Mechanical Systems ◽

International Conference

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Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.03CH37426)

The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE ◽

10.1109/memsys.2003.1189670 ◽

2003 ◽

Keyword(s):

Mechanical Systems ◽

Micro Electro Mechanical Systems ◽

International Conference ◽

Annual International Conference

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The Seventeenth IEEE International Conference on Micro Electro Mechanical Systems - MEMS 2004 (Title Page)

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290505 ◽

2004 ◽

Keyword(s):

Mechanical Systems ◽

Micro Electro Mechanical Systems ◽

International Conference ◽

Ieee International Conference

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2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

10.1109/mems35088.2015 ◽

2015 ◽

Keyword(s):

Mechanical Systems ◽

Micro Electro Mechanical Systems ◽

International Conference ◽

Ieee International Conference

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2008 IEEE 21st International Conference on Micro Electro Mechanical Systems

10.1109/mems13071.2008 ◽

2008 ◽

Keyword(s):

Mechanical Systems ◽

Micro Electro Mechanical Systems ◽

International Conference

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2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)

10.1109/mems12365.2007 ◽

2007 ◽

Keyword(s):

Mechanical Systems ◽

Micro Electro Mechanical Systems ◽

International Conference

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2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)

10.1109/mems38311.2016 ◽

2016 ◽

Keyword(s):

Mechanical Systems ◽

Micro Electro Mechanical Systems ◽

International Conference

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The 34th IEEE International Conference on Micro Electro Mechanical Systems

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2020.3008767 ◽

2020 ◽

Vol 29 (4) ◽

pp. 612-612

Keyword(s):

Mechanical Systems ◽

Micro Electro Mechanical Systems ◽

International Conference ◽

Ieee International Conference

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Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) ◽

10.1109/memsys.2001.906461 ◽

2001 ◽

Keyword(s):

Mechanical Systems ◽

Micro Electro Mechanical Systems ◽

International Conference ◽

Ieee International Conference

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The Fifteenth IEEE International Conference On Micro Electro Mechanical Systems

Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) ◽

10.1109/memsys.2002.984031 ◽

2002 ◽

Keyword(s):

Mechanical Systems ◽

Micro Electro Mechanical Systems ◽

International Conference ◽

Ieee International Conference

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国際会議報告：The 33rd International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020)

IEEJ Transactions on Sensors and Micromachines ◽

10.1541/ieejsmas.140.nl6_1 ◽

2020 ◽

Vol 140 (6) ◽

pp. NL6_1-NL6_1

Keyword(s):

Mechanical Systems ◽

Micro Electro Mechanical Systems ◽

International Conference

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