The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE
Latest Publications

TOTAL DOCUMENTS

178

(FIVE YEARS 0)

H-INDEX

10

(FIVE YEARS 0)

Published By IEEE

0780377443

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Electrostatic micromanipulation of bubbles for microreactor applications

The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE ◽

10.1109/memsys.2003.1189754 ◽

2003 ◽

Author(s):

T. Ito ◽

T. Torii ◽

T. Higuchi

Download Full-text

High resolution long array thermal ink jet printhead fabricated by anisotropic wet etching and deep Si RIE

The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE ◽

10.1109/memsys.2003.1189785 ◽

2003 ◽

Author(s):

R. Nayve ◽

M. Fujii ◽

A. Fukugawa ◽

M. Murata

Keyword(s):

High Resolution ◽

Wet Etching ◽

Download Full-text

A power-free surface-tension-driven fluidic network system for large-array enzyme immobilization and glucose sensing

The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE ◽

10.1109/memsys.2003.1189775 ◽

2003 ◽

Author(s):

Fan-Gang Tseng ◽

Kuang-Hua Lin ◽

Hui-Ting Hsu ◽

Yu-Hsiang Chang ◽

Ching-Chang Chieng

Keyword(s):

Surface Tension ◽

Free Surface ◽

Enzyme Immobilization ◽

Glucose Sensing ◽

Network System ◽

Download Full-text

CMOS-based sealed membranes for medical tactile sensor arrays

The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE ◽

10.1109/memsys.2003.1189818 ◽

2003 ◽

Author(s):

T. Salo ◽

T. Vancura ◽

O. Brand ◽

H. Baltes

Keyword(s):

Sensor Arrays ◽

Download Full-text

Fabrication of a CMOS compatible pressure sensor for harsh environments

The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE ◽

10.1109/memsys.2003.1189796 ◽

2003 ◽

Author(s):

L.S. Pakula ◽

H. Yang ◽

H.T.M. Pham ◽

P.J. French ◽

P.M. Sarro

Keyword(s):

Pressure Sensor ◽

Harsh Environments ◽

Cmos Compatible

Download Full-text

Water activated disposable and long shelf life microbatteries

The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE ◽

10.1109/memsys.2003.1189767 ◽

2003 ◽

Author(s):

Ki Bang Lee ◽

F. Sammoura ◽

Liwei Lin

Keyword(s):

Download Full-text

A new higher-pressure sensor measured by heat transfer with two heaters

The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE ◽

10.1109/memsys.2003.1189795 ◽

2003 ◽

Author(s):

H. Ohji ◽

N. Yutani ◽

M. Taruya ◽

A. Koshimizu ◽

K. Tsutsumi ◽

...

Keyword(s):

Heat Transfer ◽

Pressure Sensor

Download Full-text

A novel micro-scale recombining technique using lateral joining for a large-area molding with small features

The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE ◽

10.1109/memsys.2003.1189826 ◽

2003 ◽

Author(s):

Chih-Wei Wu ◽

Long-Sun Huang ◽

Jer-Haur Chang ◽

Sen-Yeu Yang ◽

Chih-Kung Lee

Keyword(s):

Download Full-text

A 600 kHz electrically-coupled MEMS bandpass filter

The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE ◽

10.1109/memsys.2003.1189846 ◽

2003 ◽

Author(s):

S. Pourkamali ◽

R. Abdolvand ◽

F. Ayazi

Keyword(s):

Bandpass Filter

Download Full-text

New fabrication process for Capacitive Micromachined Ultrasonic Transducers

The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE ◽

10.1109/memsys.2003.1189801 ◽

2003 ◽

Author(s):

Y. Huang ◽

A.S. Ergun ◽

E. Haeggstrom ◽

B.T. Khuri-Yakub

Keyword(s):

Fabrication Process ◽

Ultrasonic Transducers ◽

Capacitive Micromachined Ultrasonic Transducers

Download Full-text