Modeling and performance evaluation of a controlled IC fab using distributed colored timed Petri net
2005 ◽
Vol 42
(5)
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pp. 849
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Keyword(s):
2001 ◽
Vol 17
(5)
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pp. 619-636
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2002 ◽
2008 ◽
Vol 2
(2)
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pp. 75-88
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Keyword(s):
2001 ◽
Vol 14
(4)
◽
pp. 399-408
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Keyword(s):
Keyword(s):