Geometrically non-linear finite element modeling of microelectromechanical structures subjected to electrostatic loading
Keyword(s):
Keyword(s):
Keyword(s):
2008 ◽
pp. 407-408
Keyword(s):
2008 ◽
pp. 389-390
Keyword(s):
1997 ◽
Vol 30
(9)
◽
pp. 903-909
◽
Keyword(s):
Keyword(s):
2003 ◽
Vol 47
(3-4)
◽
pp. 312-323
◽