Miniature touch mode capacitance vacuum gauge with circular diaphragm
2021 ◽
Vol 39
(6)
◽
pp. 064203
2019 ◽
Vol 70
◽
pp. 158-168
Keyword(s):
2010 ◽
Vol 28
(3)
◽
pp. 486-494
◽
Keyword(s):
Keyword(s):
Keyword(s):