Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
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In situ quantitative field emission imaging using a low-cost CMOS imaging sensor

2022 ◽  
Vol 40 (1) ◽  
pp. 014202
Author(s):  
Andreas Schels ◽  
Simon Edler ◽  
Florian Herdl ◽  
Walter Hansch ◽  
Michael Bachmann ◽  
...  
Keyword(s):  
Field Emission ◽  
Low Cost ◽  
Imaging Sensor

Enhanced focused ion beam milling with use of nested raster patterns

2022 ◽  
Vol 40 (1) ◽  
pp. 014002
Author(s):  
Roberto Garcia ◽  
Lucille A. Giannuzzi ◽  
Fred A. Stevie ◽  
Phillip Strader
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

New SIMS method to characterize hydrogen in polysilicon films

2022 ◽  
Vol 40 (1) ◽  
pp. 014003
Author(s):  
Xue-feng Lin ◽  
Agi Fucsko ◽  
Kari Noehring ◽  
Elaine Gabriel ◽  
Adam Regner ◽  
...  
Keyword(s):  
Polysilicon Films
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