Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Latest Publications

TOTAL DOCUMENTS

3606

(FIVE YEARS 609)

H-INDEX

(FIVE YEARS 7)

Published By American Vacuum Society

2166-2754, 2166-2746

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Fundamental study on the selective etching of SiGe and Si in ClF3 gas for nanosheet gate-all-around transistor manufacturing: A first principle study

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0001455 ◽

2022 ◽

Vol 40 (1) ◽

pp. 013201

Author(s):

Yu-Hao Tsai ◽

Mingmei Wang

Keyword(s):

Selective Etching ◽

First Principle ◽

Fundamental Study

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Experimental considerations in electron beam transport on a nanophotonic chip using alternating phase focusing

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0001598 ◽

2022 ◽

Vol 40 (1) ◽

pp. 010602

Author(s):

Roy Shiloh ◽

Tomáš Chlouba ◽

Peter Hommelhoff

Keyword(s):

Electron Beam ◽

Beam Transport ◽

Electron Beam Transport

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In situ quantitative field emission imaging using a low-cost CMOS imaging sensor

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0001551 ◽

2022 ◽

Vol 40 (1) ◽

pp. 014202

Author(s):

Andreas Schels ◽

Simon Edler ◽

Florian Herdl ◽

Walter Hansch ◽

Michael Bachmann ◽

...

Keyword(s):

Field Emission ◽

Low Cost ◽

Imaging Sensor

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Effect of plasma-species to functionalize isocyanate-groups on multiwalled carbon nanotubes

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0001373 ◽

2022 ◽

Vol 40 (1) ◽

pp. 012804

Author(s):

Daisuke Ogawa ◽

Essam Mohammed Abdel-Fattah ◽

Keiji Nakamura

Keyword(s):

Carbon Nanotubes ◽

Multiwalled Carbon Nanotubes ◽

Multiwalled Carbon ◽

Plasma Species

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Photoinduced carrier transport mechanism in pn- and nn-GaN/GaON heterojunctions

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0001601 ◽

2022 ◽

Vol 40 (1) ◽

pp. 012204

Author(s):

Xiaojun Sun ◽

Chao Wu ◽

Yachao Wang ◽

Daoyou Guo

Keyword(s):

Transport Mechanism ◽

Carrier Transport ◽

Carrier Transport Mechanism

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Behavior of the field enhancement due to mutual depolarization on a pair of triangular emitters at short and large separations

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0001555 ◽

2022 ◽

Vol 40 (1) ◽

pp. 012801

Author(s):

Edgar Marcelino de Carvalho Neto

Keyword(s):

Field Enhancement

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Strain engineering in III-V photonic components through structuration of SiNx films

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0001352 ◽

2022 ◽

Vol 40 (1) ◽

pp. 012202

Author(s):

Brahim Ahammou ◽

Aysegul Abdelal ◽

Jean-Pierre Landesman ◽

Christophe Levallois ◽

Peter Mascher

Keyword(s):

Strain Engineering ◽

Photonic Components

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Ni3Si2 nanowires for efficient electron field emission and limitations of the Fowler–Nordheim model

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0001248 ◽

2022 ◽

Vol 40 (1) ◽

pp. 013202

Author(s):

Amina Belkadi ◽

Emma Zeng ◽

A. F. Isakovic

Keyword(s):

Field Emission ◽

Electron Field Emission ◽

Electron Field

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Technology and measurements of three-layer NiFeCuMo/Ti/NiFeCuMo structures exhibiting the giant magnetoresistance phenomenon

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0001488 ◽

2022 ◽

Vol 40 (1) ◽

pp. 012806

Author(s):

Karolina Czarnacka ◽

Jakub Kisała ◽

Andrzej Kociubiński ◽

Mateusz Gęca

Keyword(s):

Giant Magnetoresistance

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Enhanced focused ion beam milling with use of nested raster patterns

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0001411 ◽

2022 ◽

Vol 40 (1) ◽

pp. 014002

Author(s):

Roberto Garcia ◽

Lucille A. Giannuzzi ◽

Fred A. Stevie ◽

Phillip Strader

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Focused Ion Beam Milling

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Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and PhenomenaLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By American Vacuum Society

Fundamental study on the selective etching of SiGe and Si in ClF3 gas for nanosheet gate-all-around transistor manufacturing: A first principle study

Experimental considerations in electron beam transport on a nanophotonic chip using alternating phase focusing

In situ quantitative field emission imaging using a low-cost CMOS imaging sensor

Effect of plasma-species to functionalize isocyanate-groups on multiwalled carbon nanotubes

Photoinduced carrier transport mechanism in pn- and nn-GaN/GaON heterojunctions

Behavior of the field enhancement due to mutual depolarization on a pair of triangular emitters at short and large separations

Strain engineering in III-V photonic components through structuration of SiNx films

Ni3Si2 nanowires for efficient electron field emission and limitations of the Fowler–Nordheim model

Technology and measurements of three-layer NiFeCuMo/Ti/NiFeCuMo structures exhibiting the giant magnetoresistance phenomenon

Enhanced focused ion beam milling with use of nested raster patterns

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Latest Publications