Deflection behavior of Fabry-Perot pressure sensors having planar and corrugated membrane

1996 ◽  
Author(s):  
Jaeheon Han ◽  
Dean P. Neikirk
Keyword(s):  
Pressure Sensors ◽  
Fabry Perot

Interference characteristics in a Fabry–Perot cavity with graphene membrane for optical fiber pressure sensors

2014 ◽  
Vol 21 (11) ◽  
pp. 2297-2306 ◽  
Author(s):  
Cheng Li ◽  
Jun Xiao ◽  
Tingting Guo ◽  
Shangchun Fan ◽  
Wei Jin
Keyword(s):  
Optical Fiber ◽  
Pressure Sensors ◽  
Graphene Membrane ◽  
Fabry Perot

Microelectromechanical system-based, high-finesse, optical fiber Fabry–Perot interferometric pressure sensors

2020 ◽  
Vol 302 ◽  
pp. 111795 ◽  
Author(s):  
Weiyi Ma ◽  
Yi Jiang ◽  
Jie Hu ◽  
Lan Jiang ◽  
Taojie Zhang ◽  
...  
Keyword(s):  
Optical Fiber ◽  
Pressure Sensors ◽  
Microelectromechanical System ◽  
Fabry Perot ◽  
High Finesse

Novel MEMS Fabry-Perot Interferometric Pressure Sensors

2010 ◽  
Vol 638-642 ◽  
pp. 1009-1014 ◽  
Author(s):  
Ivan Padron ◽  
Anthony T. Fiory ◽  
Nuggehalli M. Ravindra
Keyword(s):  
Optical Fiber ◽  
Rigid Body ◽  
Pressure Sensors ◽  
Sensing Element ◽  
Micro Electro Mechanical Systems ◽  
Considerable Advantage ◽  
Fabry Perot ◽  
Mems Technology ◽  
Interferometric Sensor ◽  
Novel Design

A novel design for a Fabry-Perot Interferometric Sensor (FPIS) consisting of a Fabry-Perot cavity formed between two bonded surfaces is discussed. The Fabry-Perot cavity and the optical fiber to which it is coupled are used as the sensing element and interconnect, respectively. The Fabry-Perot cavity is fabricated using the Micro Electro Mechanical Systems (MEMS) technology. The introduction of a center rigid body diaphragm gives this sensor considerable advantage when compared with previous Fabry-Perot cavity based sensors.

Embedded micromachined fiber-optic fabry-perot pressure sensors in aerodynamics applications

2003 ◽  
Vol 3 (1) ◽  
pp. 102-107 ◽  
Author(s):  
M.J. Gander ◽  
W.N. MacPherson ◽  
J.S. Barton ◽  
R.L. Reuben ◽  
J.D.C. Jones ◽  
...  
Keyword(s):  
Fiber Optic ◽  
Pressure Sensors ◽  
Fabry Perot

Laser-machined fibers as Fabry-Perot pressure sensors

2006 ◽  
Vol 45 (22) ◽  
pp. 5590 ◽  
Author(s):  
Stuart Watson ◽  
Matthew J. Gander ◽  
William N. MacPherson ◽  
James S. Barton ◽  
Julian D. C. Jones ◽  
...  
Keyword(s):  
Pressure Sensors ◽  
Fabry Perot

Embedded micromachined fibre optic Fabry-Perot pressure sensors in aerodynamics applications

2003 ◽  
Author(s):  
M.J. Gander ◽  
W.N. MacPherson ◽  
J.S. Barton ◽  
R.L. Reuben ◽  
J.D.C. Jones ◽  
...  
Keyword(s):  
Pressure Sensors ◽  
Fibre Optic ◽  
Fabry Perot

Application of FFT Algorithm Associated with CZT in Demodulation of Fabry-Pérot Pressure Sensors

2008 ◽  
Vol 28 (7) ◽  
pp. 1241-1246
Author(s):  
戴霞娟 Dai Xiajuan ◽  
王鸣 Wang Ming ◽  
贲玉红 Ben Yuhong
Keyword(s):  
Pressure Sensors ◽  
Fabry Perot

Finite element analysis of fiber-optic Fabry–Perot pressure sensors based on silicon diaphragms

2019 ◽  
Vol 58 (31) ◽  
pp. 8465
Author(s):  
Rongkun Wang ◽  
Longfei Xiao ◽  
Qi Li ◽  
Xiangang Xu ◽  
Xiufang Chen ◽  
...  
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Fiber Optic ◽  
Pressure Sensors ◽  
Element Analysis ◽  
Fabry Perot
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