Development of a double-diffraction grating interferometer for measurements of displacement and angle

2020 ◽  
Author(s):  
Shao-Heng Chen ◽  
Hung-Lin Hsieh ◽  
Hong-Yi Chen ◽  
Yi-Xing Lai
Keyword(s):  
Diffraction Grating ◽  
Double Diffraction ◽  
Grating Interferometer

Mini-Nano-Displacement Measurement with Double Diffraction Grating

2011 ◽  
Vol 230-232 ◽  
pp. 1159-1163 ◽  
Author(s):  
Min Lan Jiang ◽  
Fu Peng Li ◽  
Xiao Dong Wang
Keyword(s):  
Diffraction Grating ◽  
Deflection Angle ◽  
Optical Measurement ◽  
Mathematic Model ◽  
Displacement Measurement ◽  
Fourier Optics ◽  
Light Path ◽  
Double Diffraction ◽  
Analysis Method ◽  
Optical Distance

Based on Doppler and Fourier optics analysis method, analyzed the configuration of double diffraction grating, and built its non-contact optical measurement mathematic model. And built double diffraction grating interference displacement measurement system, the design of double diffraction light path can compensate the deflection angle of grating moving, greatly improved tolerance of grating’s deflection. The compact and micro configuration of its light path, shorten optical distance, improving system’s environment anti-interference ability. Experimental resulting show, within 20nm displacement measurement, and<50mm/sec measurement speed, the system resolution is 1nm and measurement precision is less than 30nm.

The Use of an Improved Diffraction Grating Interferometer

1969 ◽  
Vol 8 (11) ◽  
pp. 2191 ◽  
Author(s):  
A. R. Maddox ◽  
R. C. Binder
Keyword(s):  
Diffraction Grating ◽  
Grating Interferometer

Diffraction grating interferometer for the accurate measurement of rotational quantities

Measurement ◽  
1995 ◽  
Vol 16 (2) ◽  
pp. 71-80 ◽  
Author(s):  
Angelika Täubner ◽  
Hans-Jürgen von Martens
Keyword(s):  
Diffraction Grating ◽  
Grating Interferometer
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