Thin-film interference effects for thin resist films on a broadband scanner
1992 ◽
Vol 10
(6)
◽
pp. 3012
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Keyword(s):
1990 ◽
Vol 11
(1-4)
◽
pp. 213-218
◽
2013 ◽
Vol 30
(6)
◽
pp. 1503
◽
Keyword(s):
1991 ◽
Vol 8
(1)
◽
pp. 123
◽