Femtosecond laser drilling of high-aspect-ratio 1-micron holes in silicon

2002 ◽  
Author(s):  
Dennis R. Alexander ◽  
B. Mihulka ◽  
David W. Doerr
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
High Aspect Ratio ◽  
Laser Drilling

Non-diffraction-length Bessel-beam femtosecond laser drilling of high-aspect-ratio microholes in PMMA

Optik ◽  
2021 ◽  
Vol 229 ◽  
pp. 166295
Author(s):  
Haoran Wang ◽  
Fan Zhang ◽  
Kaiwen Ding ◽  
Ji'an Duan
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
High Aspect Ratio ◽  
Bessel Beam ◽  
Laser Drilling

High aspect ratio, high-quality microholes in PMMA: a comparison between femtosecond laser drilling in air and in vacuum

2014 ◽  
Vol 119 (1) ◽  
pp. 61-68 ◽  
Author(s):  
Bo Xia ◽  
Lan Jiang ◽  
Xiaowei Li ◽  
Xueliang Yan ◽  
Weiwei Zhao ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
High Aspect Ratio ◽  
Laser Drilling ◽  
High Quality

Machining of micrometer-scale high aspect ratio features with single femtosecond laser pulses

2020 ◽  
Vol 32 (3) ◽  
pp. 032021
Author(s):  
Brian K. Canfield ◽  
Lino Costa ◽  
Deepak Rajput ◽  
Alexander Terekhov ◽  
Kathleen Lansford ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
High Aspect Ratio ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Micrometer Scale
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