Features of the manufacture of deep X-ray lithography masks in the siberian synchrotron and terahertz radiation center

Author(s):  
B. G. Gol’denberg ◽  
A. Yu. Abramskii ◽  
A. G. Zelinskii ◽  
A. I. Maslii ◽  
E. A. Maksimovskii ◽  
...  
2018 ◽  
Vol 61 (6) ◽  
pp. 515-530 ◽  
Author(s):  
V M Aulchenko ◽  
V V Zhulanov ◽  
G N Kulipanov ◽  
K A Ten ◽  
B P Tolochko ◽  
...  

Author(s):  
G.N. Kulipanova ◽  
A.I. Ancharov ◽  
E.I. Antokhin ◽  
V.B. Baryshev ◽  
E.L. Goldberg ◽  
...  

2016 ◽  
Vol 84 ◽  
pp. 4-12 ◽  
Author(s):  
K. Zolotarev ◽  
G. Kulipanov ◽  
E. Levichev ◽  
N. Mezentsev ◽  
V. Pindyurin ◽  
...  

2018 ◽  
Vol 188 (06) ◽  
pp. 577-594 ◽  
Author(s):  
Vladimir M. Aul'chenko ◽  
V.V. Zhulanov ◽  
Gennadii N. Kulipanov ◽  
K.A. Ten ◽  
Boris P. Tolochko ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document