Peculiarities of Electromagnetic Waves Diffraction on Regular-Periodic Inductive Metallic Structures

We consider the key aspects in electrodynamics of planar metallic microstructures with a regular-periodic topological pattern of the inductive type intended for using as frequency-selective filters in the terahertz range. The consideration is carried out by the example of low- and high-aspect structures with the topology of dipole slots. The full-wave electromagnetic simulator ANSYS HFSS™ is employed to accurately model a spectral response of such structures at different slothole sizes and thicknesses of the bearing metallic layer. These simulations allow one to explain the electrodynamic peculiarities of the similar structures fabricated by the LIGA-technology in the Siberian Synchrotron and Terahertz Radiation Centre. The presented results can be further used when developing the microstructured filters with optimized frequency selective characteristics

Elaboration of Microstructured Subterahertz Filters Via Liga Technology and Investigation of Their Selective Properties

We discuss the peculiar features of the LIGA-technology methods elaborated in the Siberian Synchrotron and Terahertz Radiation Centre (SSTRC, BINP SB RAS) and applied for producing quasi-optical subterahertz filters based on self-bearing microstructures of the metallic and pseudo-metallic types. The results of manufacturing the low- and highaspect inductive microstructures with topology of dipole slots utilized as the selective elements in the band-pass filters for the frequency range 0,25–0,45 THz are presented. The details of spectral characterization of the developed filters using a BWO-spectroscopy technique are considered. A good agreement between the results of measurements and numerical simulations is demonstrated