EFFECTIVENESS OF LOCAL THERMAL ISOLATION BY POROUS SILICON IN A SILICON THERMAL SENSOR

2001 ◽  
Author(s):  
D. N. PAGONIS ◽  
C. TSAMIS ◽  
G. KALTSAS ◽  
A. G. NASSIOPOULOU
Keyword(s):  
Porous Silicon ◽  
Thermal Sensor ◽  
Thermal Isolation

Characterization of a silicon thermal gas-flow sensor with porous silicon thermal isolation

2002 ◽  
Vol 2 (5) ◽  
pp. 463-475 ◽  
Author(s):  
G. Kaltsas ◽  
A.A. Nassiopoulos ◽  
A.G. Nassiopoulou
Keyword(s):  
Porous Silicon ◽  
Gas Flow ◽  
Flow Sensor ◽  
Thermal Isolation

Fabrication of suspended porous silicon micro-hotplates for thermal sensor applications

2003 ◽  
Vol 197 (2) ◽  
pp. 539-543 ◽  
Author(s):  
C. Tsamis ◽  
A. Tserepi ◽  
A. G. Nassiopoulou
Keyword(s):  
Porous Silicon ◽  
Thermal Sensor ◽  
Sensor Applications

A Silicon Thermal Accelerometer Without Solid Proof Mass Using Porous Silicon Thermal Isolation

2007 ◽  
Vol 7 (7) ◽  
pp. 983-989 ◽  
Author(s):  
Dimitris Goustouridis ◽  
Grigoris Kaltsas ◽  
Androula G. Nassiopoulou
Keyword(s):  
Porous Silicon ◽  
Proof Mass ◽  
Thermal Isolation

Oxidized porous silicon: a new approach in support thermal isolation of thermopile-based biosensors

1998 ◽  
Vol 67 (1-3) ◽  
pp. 205-210 ◽  
Author(s):  
V. Lysenko ◽  
Ph. Roussel ◽  
G. Delhomme ◽  
V. Rossokhaty ◽  
V. Strikha ◽  
...  
Keyword(s):  
Porous Silicon ◽  
Thermal Isolation ◽  
New Approach ◽  
Oxidized Porous Silicon

Thermal isolation in microsystems with porous silicon

2002 ◽  
Vol 99 (1-2) ◽  
pp. 13-24 ◽  
Author(s):  
V. Lysenko ◽  
S. Périchon ◽  
B. Remaki ◽  
D. Barbier
Keyword(s):  
Porous Silicon ◽  
Thermal Isolation

Porous Silicon in Microsystems: Thermal Isolation Applications

2001 ◽  
Vol 80-81 ◽  
pp. 417-428 ◽  
Author(s):  
S. Périchon ◽  
Vladimir Lysenko ◽  
B. Remaki ◽  
Daniel Barbier
Keyword(s):  
Porous Silicon ◽  
Thermal Isolation
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