silicon membrane
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2022 ◽  
Vol 251 ◽  
pp. 111640
Author(s):  
Yijie Li ◽  
Yifang Chen ◽  
Hongchang Wang ◽  
Xujie Tong ◽  
Chengyang Mu ◽  
...  

2021 ◽  
Vol 32 (1) ◽  
pp. 015003
Author(s):  
Sang-Woo Seo ◽  
Youngsik Song ◽  
Hojjat Rostami Azmand

Abstract Controlled photothermal actuation of liquid release is presented using periodically arrayed hydrogel columns in a macroporous silicon membrane. Thermo-responsive hydrogel is mixed with Gold (Au) nanorods, and surface plasmon-induced local heating by near-infrared (NIR) light is utilized as an actuation method. We adopted theoretical modeling, which treats the hydrogel as a poro-viscoelastic medium to understand the mechanical and liquid transport properties of the hydrogel. To demonstrate the feasibility of the liquid release control using NIR light, we first characterized the temperature response of Au nanorod embedded hydrogel in the silicon membrane using its optical transmission behavior to confirm the successful device fabrication. Next, the liquid release characteristics from the structure were studied using fluorescent imaging of fluorescein dye solution while pulsed NIR light was illuminated on the structure. We successfully demonstrate that the liquid release can be controlled using remote NIR illumination from the presented structure. Considering the periodically arrayed configuration with high spatial resolution, this will have a potential prospect for optically-addressable chemical release systems, which benefit retina prosthesis interfaces.


Optics ◽  
2021 ◽  
Vol 2 (3) ◽  
pp. 193-199
Author(s):  
Andrea Tognazzi ◽  
Davide Rocco ◽  
Marco Gandolfi ◽  
Andrea Locatelli ◽  
Luca Carletti ◽  
...  

We propose a new sensing device based on all-optical nano-objects placed in a suspended periodic array. We demonstrate that the intensity-based sensing mechanism can measure environment refractive index change of the order of 1.8×10−6, which is close to record efficiencies in plasmonic devices.


2021 ◽  
Vol 127 (9) ◽  
Author(s):  
Dailei Zhu ◽  
Wenbo Luo ◽  
Taisong Pan ◽  
Shitian Huang ◽  
Kaisheng Zhang ◽  
...  

2021 ◽  
Author(s):  
Mikhail Basov ◽  
Denis Prigodskiy

Abstract A mathematical model of an ultrahigh sensitivity piezoresistive chip of a pressure sensor with a range from -0.5 to 0.5 kPa has been developed. The optimum geometrical dimensions of a specific silicon membrane with a combination of rigid islands to ensure a trade-off relationship between sensitivity (Ssamples = 34.5 mV/kPa/V) and nonlinearity (2KNL samples = 0.81 %FS) have been determined. The paper also studies the range of the membrane deflection and makes recommendations on position of stops limiting diaphragm deflection in both directions; the stops allow for increasing burst pressure Pburst up to 450 кPa. The simulated data has been related to that of experimental samples and their comparative analysis showed the relevance of the mathematical model (estimated sensitivity and nonlinearity errors calculated on the basis of average values are 1.5% and 19%, respectively).


2021 ◽  
Author(s):  
Mikhail Basov ◽  
Denis Prigodskiy

<p>A mathematical model of an ultrahigh sensitivity piezoresistive chip of a pressure sensor with a range from -0.5 to 0.5 kPa has been developed. The optimum geometrical dimensions of a specific silicon membrane with a combination of rigid islands to ensure a trade-off relationship between sensitivity (S<sub>samples</sub> = 34.5 mV/kPa/V) and nonlinearity (2K<sub>NL</sub> samples = 0.81 %FS) have been determined. The paper also studies the range of the membrane deflection and makes recommendations on position of stops limiting diaphragm deflection in both directions; the stops allow for increasing burst pressure P<sub>burst</sub> up to 450 кPa. The simulated data has been related to that of experimental samples and their comparative analysis showed the relevance of the mathematical model (estimated sensitivity and nonlinearity errors calculated on the basis of average values are 1.5% and 19%, respectively).</p>


2021 ◽  
Author(s):  
Mikhail Basov ◽  
Denis Prigodskiy

<p>A mathematical model of an ultrahigh sensitivity piezoresistive chip of a pressure sensor with a range from -0.5 to 0.5 kPa has been developed. The optimum geometrical dimensions of a specific silicon membrane with a combination of rigid islands to ensure a trade-off relationship between sensitivity (S<sub>samples</sub> = 34.5 mV/kPa/V) and nonlinearity (2K<sub>NL</sub> samples = 0.81 %FS) have been determined. The paper also studies the range of the membrane deflection and makes recommendations on position of stops limiting diaphragm deflection in both directions; the stops allow for increasing burst pressure P<sub>burst</sub> up to 450 кPa. The simulated data has been related to that of experimental samples and their comparative analysis showed the relevance of the mathematical model (estimated sensitivity and nonlinearity errors calculated on the basis of average values are 1.5% and 19%, respectively).</p>


2021 ◽  
Author(s):  
Mikhail ◽  
Denis Prigodskiy

A mathematical model of an ultrahigh sensitivity piezoresistive chip of a pressure sensor with a range from −0.5 to 0.5 kPa has been developed. The optimum geometrical dimensions of a specific silicon membrane with a combination of rigid islands to ensure a trade-off relationship between sensitivity (Ssamples = 34.5 mV kPa−1 V−1) and nonlinearity (2KNL samples = 0.81%FS) have been determined. The paper also studies the range of the membrane deflection and makes recommendations on position of stops limiting diaphragm deflection in both directions; the stops allow for increasing burst pressure Pburst up to 450 kPa. The simulated data has been related to that of experimental samples and their comparative analysis showed the relevance of the mathematical model (estimated sensitivity and nonlinearity errors calculated on the basis of average values are 1.5% and 19%, respectively).


2021 ◽  
Vol 129 (21) ◽  
pp. 214501
Author(s):  
W. Peng ◽  
I. Sabri Alirezaei ◽  
N. André ◽  
X. Zeng ◽  
M. Bouterfa ◽  
...  

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