Characterization of a silicon thermal gas-flow sensor with porous silicon thermal isolation
1999 ◽
Vol 76
(1-3)
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pp. 133-138
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2004 ◽
Vol 14
(6)
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pp. 793-797
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Keyword(s):
2005 ◽
Vol 122
(2)
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pp. 231-234
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1993 ◽
Vol 3
(4)
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pp. 247-249
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Keyword(s):
2021 ◽
Vol 1829
(1)
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pp. 012021
2021 ◽
Vol 1126
(1)
◽
pp. 012006
2000 ◽
Vol 182
(1)
◽
pp. 473-477
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