Structural Design and Optimization of a Resonant Micro-Accelerometer Based on Electrostatic Stiffness by an Improved Differential Evolution Algorithm

This study designed an in-plane resonant micro-accelerometer based on electrostatic stiffness. The accelerometer adopts a one-piece proof mass structure; two double-folded beam resonators are symmetrically distributed inside the proof mass, and only one displacement is introduced under the action of acceleration, which reduces the influence of processing errors on the performance of the accelerometer. The two resonators form a differential structure that can diminish the impact of common-mode errors. This accelerometer realizes the separation of the introduction of electrostatic stiffness and the detection of resonant frequency, which is conducive to the decoupling of accelerometer signals. An improved differential evolution algorithm was developed to optimize the scale factor of the accelerometer. Through the final elimination principle, excellent individuals are preserved, and the most suitable parameters are allocated to the surviving individuals to stimulate the offspring to find the globally optimal ability. The algorithm not only maintains the global optimality but also reduces the computational complexity of the algorithm and deterministically realizes the optimization of the accelerometer scale factor. The electrostatic stiffness resonant micro-accelerometer was fabricated by deep dry silicon-on-glass (DDSOG) technology. The unloaded resonant frequency of the accelerometer resonant beam was between 24 and 26 kHz, and the scale factor of the packaged accelerometer was between 54 and 59 Hz/g. The average error between the optimization result and the actual scale factor was 7.03%. The experimental results verified the rationality of the structural design.

Vibration Energy Harvester Based on Torsionally Oscillating Magnet

Most of the miniaturized electromagnetic vibrational energy harvesters (EVEHs) are based on oscillating proof mass suspended by several springs or a cantilever structure. Such structural feature limits the miniaturization of the device’s footprint. This paper presents an EVEH device based on a torsional vibrating magnet over a stack of flexible planar coils. The torsional movement of the magnet is enabled by microfabricated silicon torsional springs, which effectively reduce the footprint of the device. With a size of 1 cm × 1 cm × 1.08 cm, the proposed EVEH is capable of generating an open-circuit peak-to-peak voltage of 169 mV and a power of 6.9 μW, under a sinusoidal excitation of ±0.5 g (g = 9.8 m/s2) and frequency of 96 Hz. At elevated acceleration levels, the maximum peak-to-peak output voltage is 222 mV under the acceleration of 7 g (±3.5 g).

Modelling vibrations of axial piezoelectric generator with active base

Modelling of an axial-type piezoelectric generator (PEG) is considered. PEG is an integral part of the system for converting mechanical vibration energy from the environment into electrical energy. The energy generator has an axial type of the configuration of elements, aimed on using bending and compressive loads simultaneously on piezoelectric elements. The base of the generator is made as an active pinching. A feature of PEG is that the generator has two types of piezoelectric elements: (1) elements located on the substrate in the form of a bimorph and (2) piezoelectric elements of a cylindrical shape, fixing the generator base, located on the same axis. PEG has a symmetrical structure about the center of proof mass. The results of modal and harmonic analysis of vibrations are given for vibration excitation of the PEG base in a certain frequency range. The analysis of the output characteristics is given.

Wide Bandwidth Vibration Energy Harvester with Embedded Transverse Movable Mass

One of the biggest challenges associated with vibration energy harvesters is their limited bandwidth, which reduces their effectiveness when utilized for Internet of Things applications. This paper presents a novel method of increasing the bandwidth of a cantilever beam by using an embedded transverse out-of-plane movable mass, which continuously changes the resonant frequency due to mass change and non-linear dynamic impact forces. The concept was investigated through experimentation of a movable mass, in the form of a solid sphere, that was embedded within a stationary proof mass with hollow cylindrical chambers. As the cantilever oscillated, it caused the movable mass to move out-of-plane, thus effectively altering the overall effective mass of the system during operation. This concept combined high bandwidth non-linear dynamics from the movable mass with the high power linear dynamics from the stationary proof mass. This paper experimentally investigated the frequency and power effects of acceleration, the amount of movable mass, the density of the mass, and the size of the movable mass. The results demonstrated that the bandwidth can be significantly increased from 1.5 Hz to >40 Hz with a transverse movable mass, while maintaining high power output. Dense movable masses are better for high acceleration, low frequency applications, whereas lower density masses are better for low acceleration applications.

Design, Simulation & Optimization of a MEMS Based Piezoelectric Energy Harvester

Energy harvesting is defined as a process of acquiring energy surrounding a system and converting it into electrical energy for usage. Piezoelectric energy harvesting is a very important concept in energy harvesting in microelectronics. In this report, an analysis of the cantilever type piezoelectric energy harvester is conducted using the finite element method (FEM) based software COMSOL Multiphysics. A unimorph type cantilever beam of the silicon substrate, structural steel as proof mass and support, and PZT-5A material as piezoelectric constitute the physical system.