Application of Matrix Projection Exposure Using a Liquid Crystal Display Panel to Fabricate Thick Resist Molds
2009 ◽
Vol 48
(8)
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pp. 082402
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2010 ◽
Vol 49
(6)
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pp. 066601
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Keyword(s):
2019 ◽
Vol 58
(1)
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pp. 24-27
1997 ◽
Vol 63
(7)
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pp. 1018-1022
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2009 ◽
Vol 508
(1)
◽
pp. 249/[611]-260/[622]
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