Negative-type extreme ultraviolet Resist Materials based on Water-Wheel-like Cyclic Oligomer (Noria)

2010 ◽  
Vol 49 (6) ◽  
pp. 06GF06 ◽  
Author(s):  
Hiroyuki Seki ◽  
Yuki Kato ◽  
Hiroto Kudo ◽  
Hiroaki Oizumi ◽  
Toshiro Itani ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Cyclic Oligomer ◽  
Negative Type ◽  
Water Wheel

Extreme Ultraviolet Resist Fabricated Using Water Wheel-Like Cyclic Oligomer with Pendant Adamantyl Ester Groups

2011 ◽  
Vol 50 (12R) ◽  
pp. 121602 ◽  
Author(s):  
Hiroyuki Seki ◽  
Hiroto Kudo ◽  
Hiroaki Oizumi ◽  
Toshiro Itani ◽  
Tadatomi Nishikubo
Keyword(s):  
Extreme Ultraviolet ◽  
Cyclic Oligomer ◽  
Water Wheel

scholarly journals Novel Noria (Water Wheel-Like Cyclic Oligomer) Derivative as a Chemically Amplified Extreme Ultraviolet (EUV)-Resist Material

2009 ◽  
Vol 22 (1) ◽  
pp. 73-76 ◽  
Author(s):  
Tadatomi Nishikubo ◽  
Hiroto Kudo ◽  
Yuji Suyama ◽  
Hiroaki Oizumi ◽  
Toshihiro Itani
Keyword(s):  
Extreme Ultraviolet ◽  
Cyclic Oligomer ◽  
Chemically Amplified ◽  
Water Wheel

scholarly journals Extreme Ultraviolet (EUV)-Resist Materials of Noria (Water Wheel-Like Cyclic Oligomer) Derivatives containing Acetal Moieties

2010 ◽  
Vol 23 (5) ◽  
pp. 657-664 ◽  
Author(s):  
Hiroto Kudo ◽  
Mayumi Jinguji ◽  
Tadaomi Nishikubo ◽  
Hiroaki Oizumi ◽  
Toshiro Itani
Keyword(s):  
Extreme Ultraviolet ◽  
Cyclic Oligomer ◽  
Water Wheel

Extreme Ultraviolet Resist Fabricated Using Water Wheel-Like Cyclic Oligomer with Pendant Adamantyl Ester Groups

2011 ◽  
Vol 50 ◽  
pp. 121602 ◽  
Author(s):  
Hiroyuki Seki ◽  
Hiroto Kudo ◽  
Hiroaki Oizumi ◽  
Toshiro Itani ◽  
Tadatomi Nishikubo
Keyword(s):  
Extreme Ultraviolet ◽  
Cyclic Oligomer ◽  
Water Wheel

Novel extreme ultraviolet (EUV)-resist material based on noria (water wheel-like cyclic oligomer)

2010 ◽  
Vol 20 (21) ◽  
pp. 4445 ◽  
Author(s):  
Hiroto Kudo ◽  
Yuji Suyama ◽  
Hiroaki Oizumi ◽  
Toshiro Itani ◽  
Tadatomi Nishikubo
Keyword(s):  
Extreme Ultraviolet ◽  
Cyclic Oligomer ◽  
Water Wheel

A novel noria (water-wheel-like cyclic oligomer) derivative as a chemically amplified electron-beam resist material

2008 ◽  
Vol 18 (30) ◽  
pp. 3588 ◽  
Author(s):  
Hiroto Kudo ◽  
Daisuke Watanabe ◽  
Tadatomi Nishikubo ◽  
Ken Maruyama ◽  
Daisuke Shimizu ◽  
...  
Keyword(s):  
Electron Beam ◽  
Cyclic Oligomer ◽  
Chemically Amplified ◽  
Water Wheel

Synthesis and property of noria (water-wheel like macrocycle) derivatives with pendant alkoxyl and adamantyl ester groups, and their application for extreme ultraviolet resist

2013 ◽  
Vol 534 ◽  
pp. 459-464 ◽  
Author(s):  
Nobumitsu Niina ◽  
Hiroto Kudo ◽  
Hiroaki Oizumi ◽  
Toshiro Itani ◽  
Tadatomi Nishikubo
Keyword(s):  
Extreme Ultraviolet ◽  
Water Wheel

scholarly journals Extreme Ultraviolet (EUV)-Resist Material Based on Noria (Water Wheel-like Macrocycle ) Derivatives with Pendant Alkoxyl and Adamantyl Ester Groups

2012 ◽  
Vol 25 (5) ◽  
pp. 587-592 ◽  
Author(s):  
Hiroto Kudo ◽  
Nobumitssu Nina ◽  
Tomoharu Sato ◽  
Hiroaki Oizumi ◽  
Toshiro Itani ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Water Wheel
Sign in / Sign up

Export Citation Format

Share Document