Extreme Ultraviolet Resist Fabricated Using Water Wheel-Like Cyclic Oligomer with Pendant Adamantyl Ester Groups
2011 ◽
Vol 50
(12R)
◽
pp. 121602
◽
2009 ◽
Vol 22
(1)
◽
pp. 73-76
◽
2010 ◽
Vol 23
(5)
◽
pp. 657-664
◽
Negative-type extreme ultraviolet Resist Materials based on Water-Wheel-like Cyclic Oligomer (Noria)
2010 ◽
Vol 49
(6)
◽
pp. 06GF06
◽
2012 ◽
Vol 25
(5)
◽
pp. 587-592
◽
Keyword(s):
2018 ◽
Vol 189
(03)
◽
pp. 323-334
◽
Keyword(s):