High Repetition and High Average Power Nd:YAG Laser for EUV Lithography

2008 ◽  
Author(s):  
Hisanori Fujita ◽  
Masahiro Nakatsuka ◽  
Ravi Bhushan ◽  
Koji Tsubakimoto ◽  
Hidetsugu Yoshida ◽  
...  
Keyword(s):  
Nd:Yag Laser ◽  
Average Power ◽  
High Average Power ◽  
High Repetition ◽  
Euv Lithography

High Average Power and High Repetition Solid State Laser for EUV Lithography

2007 ◽  
Author(s):  
Hisanori Fujita ◽  
Masahiro Nakatsuka ◽  
Ravi Bhushan ◽  
Kouji Tsubakimoto ◽  
Hidetsugu Yoshida ◽  
...  
Keyword(s):  
Solid State ◽  
Average Power ◽  
Solid State Laser ◽  
High Average Power ◽  
State Laser ◽  
High Repetition ◽  
Euv Lithography

scholarly journals Laser diode pumped Nd:YAG laser with high repetition and high average power

2014 ◽  
Vol 63 (22) ◽  
pp. 224204
Author(s):  
Wang Chao ◽  
Wei Hui ◽  
Wang Jiang-Feng ◽  
Jiang You-En ◽  
Fan Wei ◽  
...  
Keyword(s):  
Laser Diode ◽  
Nd:Yag Laser ◽  
Average Power ◽  
High Average Power ◽  
High Repetition ◽  
Diode Pumped ◽  
Diode Pumped Nd:Yag Laser

Highly Efficient High-Average Power Nd:YAG Laser with a Passive Q-Switch

1998 ◽  
pp. 407-417
Author(s):  
A. Lucianetti ◽  
N. G. Muller ◽  
R. Weber ◽  
H. P. Weber ◽  
A. Papashvili ◽  
...  
Keyword(s):  
Nd:Yag Laser ◽  
Average Power ◽  
High Average Power ◽  
Highly Efficient

High average power six-rod series connection pulsed Nd:YAG laser

2012 ◽  
Vol 24 (5) ◽  
pp. 1047-1051
Author(s):  
姜梦华 Jiang Menghua ◽  
李强 Li Qiang ◽  
雷訇 Lei Hong ◽  
惠勇凌 Hui Yongling ◽  
冯驰 Feng Chi ◽  
...  
Keyword(s):  
Nd:Yag Laser ◽  
Average Power ◽  
High Average Power ◽  
Series Connection ◽  
Pulsed Nd:Yag Laser
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