Measuring the wafer thickness and refractive index by spectral interferometry of optical frequency comb

Author(s):  
Shilin Xiong ◽  
Yuetang Yang ◽  
Guanhao Wu
2019 ◽  
Vol 27 (15) ◽  
pp. 21532 ◽  
Author(s):  
Markus Knoerzer ◽  
Crispin Szydzik ◽  
Guanghui Ren ◽  
Cesar S. Huertas ◽  
Sonya Palmer ◽  
...  

2019 ◽  
Vol 27 (15) ◽  
pp. 21463 ◽  
Author(s):  
Ryo Oe ◽  
Takeo Minamikawa ◽  
Shuji Taue ◽  
Hidenori Koresawa ◽  
Takahiko Mizuno ◽  
...  

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