Maskless nanostructure photolithography by ultrahigh order modes of the symmetrical metal-cladding waveguide

2021 ◽  
Author(s):  
Meng Zhang ◽  
Hailang Dai ◽  
Yuxi Shang ◽  
Zhuangqi Cao ◽  
Xianfeng Chen
Keyword(s):  
RSC Advances ◽  
2016 ◽  
Vol 6 (4) ◽  
pp. 3224-3230 ◽  
Author(s):  
Yang Zheng ◽  
Changming Chen ◽  
Yunlong Gu ◽  
Jihou Wang ◽  
Shouzhuo Yang ◽  
...  

The Er-containing polymer is synthesized by free-radical polymerization. Based on the copolymer, metal-cladding directly defined waveguide technique is proposed. The technique is advantageous to realize the multi-functional integrated circuits.


2021 ◽  
Vol 104 (23) ◽  
Author(s):  
Qiheng Wei ◽  
Hailang Dai ◽  
Hongrui Shan ◽  
Honggen Li ◽  
Zhuangqi Cao ◽  
...  

2010 ◽  
Vol 37 (12) ◽  
pp. 3145-3149
Author(s):  
陈麟 Chen Lin ◽  
彭滟 Peng Yan ◽  
袁明辉 Yuan Minghui ◽  
朱亦鸣 Zhu Yiming

1997 ◽  
Vol 40 (2) ◽  
pp. 465-476 ◽  
Author(s):  
K. T. Niu ◽  
K. G. Gebremedhin
Keyword(s):  

2020 ◽  
Vol 67 (12) ◽  
pp. 1053-1058
Author(s):  
Wenjuan Cai ◽  
Sidan Yu ◽  
Yingcong Zhang ◽  
Shihua Cai ◽  
Xianping Wang ◽  
...  

2009 ◽  
Vol 18 (11) ◽  
pp. 4875-4880 ◽  
Author(s):  
Chen Lin ◽  
Zhu Yi-Ming ◽  
Zhang Da-Wei ◽  
Cao Zhuang-Qi ◽  
Zhuang Song-Lin
Keyword(s):  

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