Topology of a hybrid waveguide device, which performs an effective transformation of a standard gradient titanium in-diffused waveguide mode to a hybrid waveguide mode, is considered. With its help a rather large optical mode with size optimal for coupling with standard single-mode fibers can be converted to a mode with a smaller size. Two the most perspective materials for hybrid waveguide fabrication were considered: silicon and titanium dioxide. The theoretical analysis has shown that transformation efficiency of more than 99% is achievable for waveguide devices based on titanium dioxide with contact lithography resolution.