A polarized lateral shearing interferometer and application for on-machine form error measurement of engineering surfaces

A novel lateral shearing interferometer and its anti-vibration characteristic for on-machine precision surface measurement

Optik ◽

10.1016/j.ijleo.2016.03.064 ◽

2016 ◽

Vol 127 (14) ◽

pp. 5729-5737 ◽

Cited By ~ 3

Author(s):

Liangzhou Chen ◽

Xiaojun Liu ◽

Yongsheng Gao

Keyword(s):

Surface Measurement ◽

Vibration Characteristic ◽

Machine Precision ◽

Deformation-free form error measurement of thin, plane-parallel optics floated on a heavy liquid

Applied Optics ◽

10.1364/ao.49.001849 ◽

2010 ◽

Vol 49 (10) ◽

pp. 1849 ◽

Cited By ~ 6

Author(s):

Jiyoung Chu ◽

Ulf Griesmann ◽

Quandou Wang ◽

Johannes A. Soons ◽

Eric C. Benck

Keyword(s):

Heavy Liquid ◽

Free Form ◽

Error Measurement ◽

Form Error ◽

Plane Parallel

Analysis of laser M2 determination in a quadriwave lateral shearing interferometer with CCD vertical blooming

Optics Communications ◽

10.1016/j.optcom.2018.10.003 ◽

2019 ◽

Vol 433 ◽

pp. 183-189

Author(s):

Lingqiang Meng ◽

Yiming Liu ◽

Zhigang Han ◽

Hua Shen ◽

Lei Chen ◽

...

Keyword(s):

𝛍m-resolution thickness distribution measurement of transparent glass films by using a multi-wavelength phase-shift extraction method in the large lateral shearing interferometer

Optics Express ◽

10.1364/oe.27.002899 ◽

2019 ◽

Vol 27 (3) ◽

pp. 2899 ◽

Cited By ~ 1

Author(s):

Yugang Ren ◽

Zhang Cao ◽

Xiaoyang Tang ◽

Heng Xie ◽

Lijun Xu

Keyword(s):

Phase Shift ◽

Extraction Method ◽

Thickness Distribution ◽

Distribution Measurement ◽

Transparent Glass ◽

Lateral Shearing ◽

Multi Wavelength ◽

Glass Films

The Off-Axis Parabolic Mirror Optical Axis Adjustment Method in a Wedge Optical Plate Lateral Shearing Interferometer

Lecture Notes in Electrical Engineering - Frontier Computing ◽

10.1007/978-981-10-0539-8_71 ◽

2016 ◽

pp. 721-730

Author(s):

Feng-Ming Yeh ◽

Der-Chin Chen ◽

Shih-Chieh Lee ◽

Ya-Hui Hsieh

Keyword(s):

Optical Axis ◽

Parabolic Mirror ◽

Adjustment Method ◽

Instantaneous Phase-Shifting Lateral-Shearing Interferometer

Journal of the Korean Physical Society ◽

10.3938/jkps.52.1004 ◽

2008 ◽

Vol 52 (4) ◽

pp. 1004-1009 ◽

Cited By ~ 1

Author(s):

Jae Bong Song ◽

Yun Woo Lee ◽

Ho Soon Yang

Keyword(s):

Phase Shifting ◽

Instantaneous Phase ◽

Phase Shifting Jamin Lateral Shearing Interferometer

Chinese Journal of Lasers ◽

10.3788/cjl20093605.1156 ◽

2009 ◽

Vol 36 (5) ◽

pp. 1156-1159

Author(s):

王利娟 Wang Lijuan ◽

刘立人 Liu Liren ◽

栾竹 Luan Zhu ◽

孙建锋 Sun Jianfeng ◽

周煜 Zhou Yu

Keyword(s):

Phase Shifting ◽

Lateral shearing interferometer using phase-shifting technique without moving element

10.1117/12.505396 ◽

2004 ◽

Author(s):

Jae Bong Song ◽

Yoon Woo Lee ◽

In Won Lee ◽

Jung Hoon Lee

Keyword(s):

Phase Shifting ◽

Phase Shifting Technique ◽

Collimated Light Acoustooptic Lateral Shearing Interferometer

Applied Optics ◽

10.1364/ao.13.001004 ◽

1974 ◽

Vol 13 (5) ◽

pp. 1004 ◽

Cited By ~ 2

Author(s):

J. F. Ebersole ◽

J. C. Wyant

Keyword(s):