EXCITED SPECIES AND C-ATOM DENSITY DOWNSTREAM AN Ar PLASMA TORCH WITH OLEFINS (CH4, CF4) IN IMPURITY

Author(s):  
Andre Ricard ◽  
S. Al Ayoubi ◽  
S. Cavadias ◽  
Jacques Amouroux
2011 ◽  
Vol 109 (2) ◽  
pp. 023301 ◽  
Author(s):  
J. Henriques ◽  
E. Tatarova ◽  
C. M. Ferreira
Keyword(s):  

2011 ◽  
Vol 109 (2) ◽  
pp. 023302 ◽  
Author(s):  
J. Henriques ◽  
E. Tatarova ◽  
F. M. Dias ◽  
C. M. Ferreira
Keyword(s):  

2015 ◽  
Vol 24 (2) ◽  
pp. 025003 ◽  
Author(s):  
Shou-Zhe Li ◽  
Chuan-Jie Chen ◽  
Xin Zhang ◽  
Jialiang Zhang ◽  
Yong-Xing Wang

2015 ◽  
Vol 43 (5) ◽  
pp. 1683-1687 ◽  
Author(s):  
Shou-Zhe Li ◽  
Chuan-Jie Chen ◽  
Jialiang Zhang ◽  
Yong-Xing Wang ◽  
Hongda Li

2014 ◽  
Vol 516 ◽  
pp. 012004 ◽  
Author(s):  
J Henriques ◽  
E Tatarova ◽  
F M Dias ◽  
C M Ferreira
Keyword(s):  

1995 ◽  
Vol 15 (2) ◽  
pp. 221-230 ◽  
Author(s):  
S. Cavadias ◽  
J. Amouroux ◽  
L. Hochard ◽  
A. Ricard
Keyword(s):  

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